Synthesis of hafnium nanoparticles and hafnium nanoparticle films by gas condensation and energetic deposition

• Irini Michelakaki,
• Nikos Boukos,
• Dimitrios A. Dragatogiannis,
• Spyros Stathopoulos,
• Costas A. Charitidis and
• Dimitris Tsoukalas

Beilstein J. Nanotechnol. 2018, 9, 1868–1880, doi:10.3762/bjnano.9.179

• nanoparticles is reported for the first time in the literature. Keywords: energetic deposition; hafnium; inert-gas condensation; nanomechanical properties; nanoparticles; nanoparticle thin films; Introduction In the past decades, the interest in and the exploitation of metal nanoparticles (NPs) spread across

• and co-workers [53]. Energetic deposition (Vs ≠ 0 kV) – deposition conditions During the energetic deposition, Hf NPs were produced by inert-gas condensation technique under exactly the same deposition conditions described above, except for the substrate bias voltage Vs. These deposition conditions

• results in the vast majority of the NPs being charged (see Supporting Information File 1, Section 2). The energetic deposition of nanoparticles was studied for substrate bias values of Vs = 2 and 4.5 kV and for Hf NPs with the smallest mean dimensions (ca. 9.5 nm × 7 nm, aggregation-zone length D = 50 mm